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Name:  Jun Akedo

 

Education and Record of Professional Experience

B.S. (1984), M.S. (1986) and Ph.D. (1990) all in applied physics from Waseda University, Assistant Professor at Waseda University (1989-1991), Researcher (1991-1993) and Senior Researcher (1994-2001) at National Institute of Mechanical Engineering Laboratory (MEL), Group Leader (2001-2008), Principal Research Scientist (2009-2010), Prime Senior Research Scientist (2010-2014 ), and Director of Advanced Coating Technology Research Center(2015- ) at National Institute of Advanced Industrial Science and Technology (AIST), Professor at Tokyo Institute of Technology (2009-2014 ), Visiting Professor at Shibaura Institute of Technology (2009- ), and Visiting Professor at Toyohashi University of Technology (2014- )

 

Content of lecture

“Room Temperature Impact Consolidation and Its Application to Ceramic Coating”

- Aerosol Deposition (AD) Method -

Coating processes that are thought to utilize purely collision pressure or impact force such as aerosol deposition (AD) method and cold spray (CS) method are attracting attention. These accelerate microparticles and ultrafine particles by carry gas to several hundred m / sec or more, make them into a jet stream and collide with the substrate, realize dense coating with good adhesion just by supplying purely mechanical energy. It is thought that fine particles of metals and ceramics are macroscopically bonded at room temperature while remaining in a nearly solid state. In fact, it has been confirmed that, in the aerosol deposition method, it is possible to form a dense ceramic thin film or a thick film having a microcrystal structure of several tens of nanometers or less at room temperature and to obtain excellent electromechanical properties. Then, in the field of semiconductor manufacturing equipment, it has been commercialized as an important coating process.  This is called "Room Temperature Impact Consolidation (RTIC)". When viewed as a powder forming process, this phenomenon is fundamentally different from a thermal spray coating and shock compaction in which raw material particles are brought into a molten or semi-molten state to obtain bonding between primary particles.

 In this presentation, the deposition mechanism of the AD process with RTIC phenomenon and the importance of this phenomenon for the future coating technology are explained.

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